This book presents an analysis of the acoustic coupling between the elements of a MEMS (Micro-Electro-Mechanical Systems) array. Towards this end, the physical model of such an array and its electro-mechano-acoustical circuit has been defined and analyzed. Since the MEMS transducers are combined in array configurations having small inter-element distance, the total pressure field is the superposition of the fields generated by the individual array elements. Such MEMS arrays are appealing because they can be used as digital transducers. The functionality of a MEMS array as a digital transducer is demonstrated and the method of Matched Asymptotic Expansions (MAE) is used. The method is not restricted to a specific geometry or velocity distribution with reference to the surface of the vibrating surface.
Dr. Kassiani Kotsidou received her Ph.D. degree from the University of Massachusetts, Lowell. Prior to pursuing doctoral studies, she worked in the industry primarily as a software engineer. After the receipt of her doctoral degree, she has been working in the academia, where her primary focus is teaching electrical engineering subjects.
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LAP LAMBERT Academic Publishing
acoustic coupling, Micro-Electro-Mechanical Systems array
SCIENCE / Mechanics